Junliang Liu, Chunwang Wang, Wangyang Liu, Zekai Zhang
Abstract Conventional SPICE models for single photon avalanche diodes (SPADs) face limitations in accurately characterizing key device performance parameters and quantifying optical and electrical crosstalk (ECT) during device optimization and circuit level simulation, which restricts the design precision of SPAD arrays. To tackle this issue, this study presents a novel SPICE crosstalk model that characterizes the SPAD’s photon detection probability (PDP) and photocurrent based on TCAD simulations, and implements the quantification of optical and ECT using Verilog-A for practical array circuit simulation. TCAD results show that the absolute error of the peak PDP is only 0.3% against experimental data, and after integrating crosstalk mechanisms, the overall absolute error of the SPICE model for SPAD arrays is controlled within 0.2%. The model accurately reproduces crosstalk effects and verifies its accuracy and practicability, laying a reliable theoretical basis for high-precision SPAD array simulation and design.