Design and Optimization of Hollow Rotating Traveling Wave Ultrasonic Motor Based on Laser Beam Expander

To meet the critical need for rapid response and miniaturization in laser beam expander drive systems, this study proposes an innovative actuation solution based on a hollow rotary traveling-wave ultrasonic motor. By thoroughly analyzing the optical adjustment mechanism of laser beam expanders and the electromechanical coupling behavior of ultrasonic motors, the motor structure was systematically optimized. Using a multiphysics coupling approach, the performance of stators fabricated from three distinct materials was compared, and parametric optimization was conducted. Experimental verification confirms that the developed ultrasonic motor precisely matches the load characteristics of beam-expanding optics while fulfilling the stringent requirements for both fast response and compact design. This research provides a reference for the miniaturization drive of high-precision optical systems, with promising applications in space optics and precision instrumentation.