Review of Research Advances in Gyroscopes’ Structural Forms and Processing Technologies Viewed from Performance Indices

As typical examples of rotational rate sensors, microelectromechanical system (MEMS) gyroscopes have been widely applied as inertial devices in various fields, including national defense, aerospace, healthcare, etc. This review systematically summarizes research advancements in MEMS gyroscope structural forms and processing technologies, which are evaluated through performance indices. The review encompasses several areas. First, it outlines the modelling principles and processes of gyroscopes on the basis of the Coriolis force and resonance, establishing a theoretical foundation for MEMS gyroscope development. Second, it introduces and analyzes the latest research advances in MEMS gyroscope structures and corresponding processing technologies. On the basis of published research advances, this review categorically discusses multidisciplinary technology properties, statistical results, the existence of errors, and compensation methods. Additionally, it identifies challenges in MEMS gyroscope technologies through classification analysis.