Thermally Stable HfO2-Based Ferroelectric Transistors for CMOS-Compatible Energy-Efficient Neuromorphic Integrated Circuits.

HfO2 based thin-film ferroelectrics are metastable at room temperature and transited to the dielectric monoclinic phase upon heating. The thermal stability of such ferroelectrics increases when thin-film oxides are buried (BOX) in silicon-ferroelectric-silicon (SFS) structures formed by SmartCut®, where thin ferroelectric layers are stabilized by oxygen vacancies and tensile stresses in the BOX, which is similar to silicon-on-insulator (SOI) structures. The main characteristics of the ferroelectrics in MFS and SFS structures are residual polarization Pr and coercive field Ec, which are determined by the fraction of the metastable ferroelectric phases that are also stabilized due to the inserted Al impurity in HfO2:Al2O3 10:1 (HAO) and (HfO2:ZrO2):Al2O3 (1:1)5:1 (HZAO) nanolaminates. SFS structures and SFS CMOS ICs were tested after all thermal treatments at temperatures 900-1000 °C with tBOX = 10-20 nm (or equivalent oxide thickness EOT = 1-2 nm) in an industrial process as gate insulators for CMOS and dual-gate DG SFS transistors. Their characteristics simulated in TCAD Sentaurus and analytic models in LTspice are investigated for an analog content addressable memory (ACAM).