Pei-Pei Hsu, Jr-Lung Lin
This study presents a comprehensive numerical and experimental investigation on a pneumatically actuated polydimethylsiloxane (PDMS) micropump integrated with passive check valves (PCVs). Advanced three-dimensional (3D) fluid-structure interaction (FSI) simulations were conducted to capture the nonlinear large deformation of the membrane and elucidate the Newtonian flow dynamics. The maximum deformation calculated by the simulations was compared with the theoretical Timoshenko formula, demonstrating excellent agreement across the entire pressure range (3.0-100.0 kPa). The 3D FSI simulations revealed a considerable asymmetry in the flow dynamics between the suction and compression phases. Notably, at applied pressures exceeding 20.0 kPa, the discharge volume substantially outweighed the suction one. To characterize both the ideal and practical volumetric flow rates, curve-fitting analyses revealed that both the simulation and experimental data follow a consistent 1/3-power-law relationship with respect to the applied pressure. Experimentally, the micropump achieved a maximum volumetric flow rate of 2.6 mL/min at 70.0 kPa and 12.0 Hz. Furthermore, the micropump demonstrated a peak pumping efficiency of 56.95% at 35.0 kPa and 10.0 Hz relative to the ideal numerical baseline. By bridging idealized numerical bounds with experimental realities, this validated framework offers a robust predictive tool for optimizing flow asymmetry and pumping efficiency in advanced microfluidic systems.