Development of MEMS Pressure Sensor With High Proof Pressure for Multiple Discrete Adjustable Ranges Up to 10–60 kPa

The various application conditions of MEMS pressure sensors require achieving a wide range of specific parameters. The ability of performance retention for pressure sensor by repeated proof pressure is one of the important requirements. The research presents a new microassembly design for the piezoresistive pressure sensor chip for multiple discrete adjustable differential ranges, where the minimum range is from -10 to 10 kPa and the maximum range is from -60 to +60 kPa. The microassembly design contains stops on both sides of the chip to increase the proof pressure to Pproof= 1.5 MPa. Additionally, the microassembly also allows for significant improvement of mechanical decoupling of chip from packing and all existing mechanical connections. The research demonstrates the effectiveness of error reduction in the case of preliminary operation by thermocycling and barocycling for pressure sensor. In results, more than 120 samples of developed pressure sensor have sensitivity S = 0.61 ± 0.15 mV/V/kPa and low error for nonlinearity 2KNLPproofcomp0stab0stab< 0.20%/FS.