Zilai Wang, Naibo Zhang, Yiran Zhang, Haozhe Hou, Yu Jin, Conghui Liu, Haijian Huang, Qiuquan Guo, Jianming Huang, Yansong Cui, Weizheng Ren, Dongxing Zhang, Ke Han, Jun Yang
In recent years, micro-electromechanical systems (MEMS) actuators have emerged as innovative solutions for enhancing the dynamic control of terahertz devices, leveraging their advantages of miniaturization, low power consumption, and high integration. This paper provides a comprehensive review of the fundamental technological advancements in terahertz MEMS actuators, with a particular emphasis on the analysis of the performance characteristics of various driving mechanisms and the integration strategies. Furthermore, it systematically presents the diverse forms of terahertz MEMS actuators utilized in terahertz switches and tunable resonators, highlighting the significant advancements they have made in applications including sensing, frequency and polarization tuning, beamforming, and logical operations. By leveraging cutting-edge microfabrication techniques and functional materials, terahertz MEMS actuators are capable of achieving wideband tuning, high-sensitivity sensing, and the modulation of intricate electromagnetic responses. Additionally, the review examines prospective development trajectories, offering theoretical insights and technical strategies to support the transition of terahertz technology from laboratory settings to practical applications in domains such as 6 G communication, high-resolution imaging, and intelligent sensing.