Electric split-ring resonator with tunable electromagnetically induced transparency filtering, switching, attenuating and sensing applications

• Five electric split-ring metamaterial (ESRM) devices are proposed. • ESRM-1 gives a continuous blue shift of 160 GHz, forming a tunable filter. • ESRM-2 shows EIT-like window for attenuation and switching characteristics. • ESRM-3 functions as a gap-controlled switch. • ESRM-4 serves as a polarization-controlled switch and gap-controlled attenuator. • ESRM-5 combines filtering and attenuation capabilities. Despite the potential of terahertz (THz) metamaterials in various applications, most existing designs suffer from limited tunability and static resonant frequencies. To address these challenges, we present an electric split-ring Resonator (eSRR) with real-time reconfigurability driven by using micro-electro-mechanical system (MEMS) technique in the THz band. The released cantilevers of eSRR are suspended above a silicon (Si) substrate. Five distinct eSRR configurations, eSRR-1 to eSRR-5, are proposed to possess distinct functions. Simulations show that the gap tuning between cantilevers and substrate surface in symmetric eSRR-1 gives a continuous blue shift of 160 GHz, forming a tunable filter. eSRR-2 with a lateral offset shows bright–dark coupling effect, which opens an electromagnetically induced transparency (EIT) like window for attenuation and switching characteristics. Adjusting the gaps of eSRR-2 yields the configurations of eSRR-3, eSRR-4, and eSRR-5. eSRR-3 functions as a gap-controlled switch, eSRR-4 serves as a polarization-controlled switch and gap-controlled attenuator, while eSRR-5 combines filtering and attenuation capabilities. eSRR-4 achieves the refractive-index sensitivity of 61.33 GHz/RIU, whereas eSRR-2 and eSRR-3 keep Q-factors above 20 while still delivering high sensitivity. By integrating frequency tuning, intensity control, and resonance-mode selectivity on a single planar chip, the cantilever-tunable eSRR provides a compact route toward integrated and programmable filters, switches, attenuators, and sensors in a THz photonic system. Tunable MEMS-based electric split-ring resonators (eSRRs) are propsped for filtering, switching, attenuation, and sensing in the THz band.