An Adaptive-Output Operational Amplifier for Electrostatic Closed-Loop MEMS Gyroscope Drive Circuits.

To address the challenge that microelectromechanical system (MEMS) gyroscope electrostatic force-modulated closed-loop self-excited driving circuits experience significant dynamic variations in capacitive load and driving demand under different operating conditions, such as start-up, steady-state resonance maintenance, and environmental perturbations, making it difficult to simultaneously achieve strong driving capability, stable oscillation, and low power consumption, this paper proposes a high-energy-efficiency adaptive output operational amplifier architecture. Based on a dynamic load-sensing mechanism, the design introduces a three-threshold decision scheme combining a high threshold, a low threshold, and a mid-supply reference voltage. By coordinating a continuous-time voltage detection circuit with a bidirectional shift register, the proposed approach enables accurate identification of the output state and the load level. A time-division-multiplexed two-stage control strategy is adopted to rapidly compensate for the drive capability under abrupt load changes, while proactively disabling redundant output units under steady-state conditions, thereby achieving power delivery on demand. The output stage employs a Class-AB push-pull structure integrating an improved low-leakage single-pole double-throw (SPDT) switch, which hard shuts off the power transistors in the non-operating state to effectively eliminate the subthreshold leakage current. Circuit simulations in a 0.18 μm CMOS process demonstrate that the proposed operational amplifier can adaptively regulate its output current in real time according to variations in the gyroscope driving demand, ensuring sufficient an electrostatic driving force and oscillation stability during transient conditions while significantly reducing static power consumption during the resonance steady state. The proposed design provides an effective solution for high-performance and high-energy-efficiency interface circuit design in MEMS gyroscope electrostatic force-modulated closed-loop self-excited driving systems.