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◆ Micromachines2026-02-11· Hydrophone

Design and Development of Sc0.2Al0.8N-Based Dual-Piezoelectric-Layer MEMS Hydrophone

Danfeng Cui, Xiaoya Duan, Ziyue Guan, Ningyuan Hu, Yikun Guo, Yiming Yao, Haojie Yan, Chenyang Xue

原始摘要(英文原文)· Original abstract
N) is presented. By designing the dual piezoelectric layer, the frequency response range has been expanded and the sensitivity of the device has been significantly enhanced. Meanwhile, doping with scandium can significantly increase the piezoelectric coefficient, enhancing the sensitivity. According to the standard underwater acoustic calibration test, the device exhibits an average sound pressure sensitivity of -162 dB (re: 1 V/μPa) across the 20 Hz-50 KHz frequency band and equivalent noise density of 47 dB (re: 1 μPa/√Hz) with a linearity of 99%. The experimental results show that the comprehensive performance of the dual-piezoelectric-layer hydrophone provides a new solution for underwater sensing and detection, and opens up a new path for the performance optimization of passive sonar systems.
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Design and Development of Sc0.2Al0.8N-Based Dual-Piezoelectric-Layer MEMS Hydrophone — 科研速览 Science Skim