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◆ Chemosensors2026-01-04· Microelectromechanical systems

In-Vehicle Gas Sensing and Monitoring Using Electronic Noses Based on Metal Oxide Semiconductor MEMS Sensor Arrays: A Critical Review

Xu Lin, Ruimin Tan, Wenfeng Shen, Dawu Lv, Weijie Song

原始摘要(英文原文)· Original abstract
Volatile organic compounds (VOCs) released from automotive interior materials and exchanged with external air seriously compromise cabin air quality and pose health risks to occupants. Electronic noses (E-noses) based on metal oxide semiconductor (MOS) micro-electro-mechanical system (MEMS) sensor arrays provide an efficient, real-time solution for in-vehicle gas monitoring. This review examines the use of SnO2-, ZnO-, and TiO2-based MEMS sensor arrays for this purpose. The sensing mechanisms, performance characteristics, and current limitations of these core materials are critically analyzed. Key MEMS fabrication techniques, including magnetron sputtering, chemical vapor deposition, and atomic layer deposition, are presented. Commonly employed pattern recognition algorithms—principal component analysis (PCA), support vector machines (SVM), and artificial neural networks (ANN)—are evaluated in terms of principle and effectiveness. Recent advances in low-power, portable E-nose systems for detecting formaldehyde, benzene, toluene, and other target analytes inside vehicles are highlighted. Future directions, including circuit–algorithm co-optimization, enhanced portability, and neuromorphic computing integration, are discussed. MOS MEMS E-noses effectively overcome the drawbacks of conventional analytical methods and are poised for widespread adoption in automotive air-quality management.
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In-Vehicle Gas Sensing and Monitoring Using Electronic Noses Based on Metal Oxide Semiconductor MEMS Sensor Arrays: A Critical Review — 科研速览 Science Skim