Linear fluorescent glass for 193 nm detection.

We report a Ce3+/Tb3+ co-doped glass for wavelength-conversion-based detection of 193 nm ArF excimer lasers. The glass exhibits efficient Tb3+ emission under deep-ultraviolet excitation through host-assisted Ce3+-Tb3+ energy transfer enabled by its low-phonon-energy network. In contrast to the optimum Tb4O7 concentration of 5 mol% under 373 nm excitation, the strongest 193 nm emission is obtained at 4 mol%, indicating a distinct excitation mechanism involving the glass host. The optimized sample displays a linear fluorescence response to incident laser power (R2=0.94) with a detection limit of 0.63 W, demonstrating the feasibility of real-time monitoring of low to medium power ArF excimer lasers using wavelength conversion.