Xinyi Guo, Jinjian Yan, Penggang Li, Xu Yang, Linhua Cao, Yijin Liao, Weifang Lu, Jinchai Li, Kai Huang, Junyong Kang, Rong Zhang
We report the integration of an omnidirectional reflector (ODR) into GaN-based Micro-LEDs to enhance photon management and external quantum efficiency (EQE) in ultra-small devices. Conventional distributed Bragg reflectors (DBRs) suffer performance loss under sidewall thickness variation and oblique photon incidence, limiting light extraction in micrometer-scale Micro-LEDs. In contrast, simulations show that ODRs maintain high reflectance under both sidewall thickness variation and wide-angle incidence, efficiently redirecting photons toward the designated surface. Experimentally, a Micro-LED with a 2 μm lateral size achieves a peak EQE of 42.3% after ODR integration, compared with approximately 25.6% for the device without an optical reflector. This corresponds to an absolute increase of about 16%, or a relative improvement of 67%. Meanwhile, the ODR-integrated devices maintain stable electrical characteristics and exhibit enhanced EQE across a broad current density range. These results establish ODR integration as a scalable and practical strategy for efficient photon extraction in GaN-based ultra-small Micro-LEDs, with direct implications for high-resolution micro-display applications.