Lei Chen, Qian Wen Wu, Ze Gu, Qian Ma, Lei Xiao, Zhao Tian, Wen Qi Su, Hao Yang Cui, Jian Wei You, Tie Jun Cui
Electromagnetic diffractive neural networks (DNNs) enable ultra-low-power, low-latency artificial intelligence (AI) inference, yet optical implementations suffer from fabrication and scalability limits, and metasurface microwave systems remain bulky. We present a chip-scale microwave diffractive neural network (MDNN) fabricated in a GaAs semiconductor process, integrating cascaded couplers and phase shifters to implement a diffraction network within a millimeter-scale footprint. The MDNN chip reduces the size of conventional MDNNs by over four orders of magnitude, achieves a computational latency of 2.05 ns, and delivers a system-level energy efficiency of 0.83 TOPS/W. We demonstrate its versatility through three functional prototypes: MNIST handwritten digit recognition, multi-user interference suppression, and real-time obstacle perception for drones. These experiments achieved more than 86% accuracy, validating the capability of the MDNN chip to directly perform both digital image processing and in-situ electromagnetic information processing in the microwave domain. We hope this chip architecture opens a new pathway toward highly integrated designs for electromagnetic DNNs.