Inductive Microsensor for Magnetic Field Detection: Application in Wireless Power Transfer Systems.

Wireless Power Transfer (WPT) has emerged as a compelling alternative to wired charging; however, efficiency and safety are highly dependent on magnetic field distribution and leakage. This work presents a compact MEMS-based magnetic field induction sensor, including its design, fabrication, and electrical characterization, for real-time diagnosis in WPT systems. The sensor employs a Ni/Cr metallic inductor fabricated on a SiO2 substrate using standard photolithography and occupies a footprint of 5 mm × 5 mm. The device is electrically characterized through impedance, quality factor, and frequency response measurements, followed by experimental validation using an industry-standard wireless charging system and dedicated signal-conditioning circuitry. The results from inductive coupling simulations, performed with the Magpylib Python library, align with experimental data showing that the sensor accurately follows theoretical magnetic field decay, detecting AC signals between 40 mV and 140 mV with a functional limit of 30 mm. Furthermore, experimental characterization through spatial mapping successfully identifies magnetic leakage hot spots, while thermal validation via infrared thermography correlates these magnetic readings with localized temperature increases. This integrated approach supports EMC optimization and thermal risk mitigation, providing a low-cost and effective diagnostic tool for enhancing safety and performance in WPT applications.