T. Weber, Daniel Jetter, Jörg Ullmann, Simon Koch, Simon F. Pfander, Katharina Christina Kreß, Andriani Vervelaki, B. Gross, Oliver Kieler, Ute Drechsler, Priya R. Baral, Arnaud Magrez, R. Kleiner, Armin W. Knoll, Martino Poggio, D. Koelle
Nanoscale superconducting quantum interference devices (SQUIDs) integrated on scanning probes are important for high-resolution magnetic imaging at low temperatures. Progress has been limited by a lack of robust sensors that can both be fabricated on the wafer scale and provide the highest spatial resolution. The authors combine optical lithography and focused-ion-beam milling to produce niobium nano-SQUIDs on silicon cantilevers, achieving high spatial resolution and sensitivity in magnetic fields of up to 0.5 T at 4.2 K. These sensors can image individual magnetic skyrmions and nanoscale magnetization patterns, significantly expanding the applicability of scanning SQUID microscopy.