High-yield fabrication of micromirror templates via feedback-controlled laser ablation.

We present a high-yield method for fabricating concave micromirror templates in silica using feedback-controlled CO2 laser ablation with precise in situ positioning. Real-time monitoring of the white-light emission generated during ablation is used to terminate laser exposure, thereby reducing shot-to-shot variability in mirror depth and radius of curvature. To ensure reproducible single-shot processing across different substrates, the sample position relative to the laser focus is calibrated using an in situ phase-scanning interferometric microscope integrated into the fabrication workflow. The method enables reliable fabrication of shallow mirror templates with tunable radii of curvature spanning from ∼20 μm to several hundred micrometers, with relative geometric variances as low as 3%. The suitability of our process is verified by realizing a micromirror at a precise location of a pre-patterned substrate, which is used in a compact plano-concave Fabry-Perot microcavity with finesse of 3.7 × 104 at telecom wavelengths. The setup provides a simple and automated route to reproducible micromirror fabrication for applications in cavity quantum electrodynamics and cavity optomechanics.