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◆ Applied Physics Reviews2025-10-21· Microelectronics

Advancing microelectronics through nanoscale science: A perspective on needs and opportunities from the nanoscale science research centers

Adelaide Bradicich, Christopher Allemang, Sadhvikas Addamane, Stephen D. House, Aiping Chen, Jinkyoung Yoo, Ezra Bussmann, Christopher M. Smyth, Petro Maksymovych, Martí Checa, Sabine M. Neumayer, Ondrej Dyck, Jianguo Wen, Luca Basso, Pauli Kehayias, Andrew Mounce, Chloe F. Doiron, Michael T. Pettes, Nan Li, Luke Yates, Amun Jarzembski, Charles Thomas Harris, Chang‐Yong Nam, Michael Titze, Lisa Hackett, Akshay Wali, Anirudha V. Sumant, Prasad P. Iyer, W. Pan, Chris Jozwiak, Ricardo Ruiz, Rémi Dingreville, Jeffrey S. Nelson, Tzu‐Ming Lu

原始摘要(英文原文)· Original abstract
Microelectronics are the cornerstone of the modern world, enhancing our daily lives by providing services such as communications and datacenters. These resources are accessible thanks to the continual pursuit of a deeper understanding of the chemical and physical phenomena underlying the materials synthesis approaches and fabrication processes used to create microelectronic components and subsequently the components' responses to electrical, optical, and other stimuli that are utilized within microelectronic systems. Today, further development of microelectronics requires multidisciplinary expertise across scientific disciplines and fields of study—synthesis, materials characterization, nanoscale fabrication, and performance characterization—with focus placed on comprehending the nanoscale forms and features of microelectronic components. The Nanoscale Science Research Centers (NSRCs) are Department of Energy, Office of Science user facilities that support the international scientific community in advancing nanoscale science and technology. As a key component of the U.S. Government's National Nanotechnology Initiative, the NSRCs enable transformative discoveries by providing world-class facilities, expertise, and collaborative opportunities. In this perspective, we showcase a non-exhaustive cross-section of the capabilities housed at and developed by the NSRCs and their user communities to address fundamental synthesis, metrology, fabrication, and performance considerations toward advancing the development of new microelectronics. Finally, we provide a timely outlook on the next major areas of necessary development in nanoscale sciences to continue the innovation of microelectronics into the next generation.
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