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◆ ACS Sensors2026-03-25· Heterojunction

Humidity-Independent NO <sub>2</sub> Gas Sensors Based on CeO <sub>2</sub> /ZnO/WO <sub>3</sub> Heterostructure Films Fabricated by Template-Assisted Magnetron Sputtering

Weixiang Gao, Yuxuan Liu, Xueting Chang, O. Ola, Zheng Wang, Haoyang Li, Jian Li, Yi Jiang, Dongsheng Wang, Shibin Sun

原始摘要(英文原文)· Original abstract
The detection of trace nitrogen dioxide (NO 2 ) in port atmospheres is crucial for protecting occupational health and maintaining air quality in coastal cities. Nonetheless, the reliable monitoring of NO 2 remains a challenge in complex environments featuring high humidity, diverse gas compositions, and dynamically fluctuating concentrations, which impose substantial interference. Here, the NO 2 sensors based on the CeO 2 /ZnO/WO 3 (CZWT) heterostructure films were fabricated via the template-assisted magnetron sputtering. The optimal device exhibited outstanding NO 2 sensing performance at 280 °C with high response (81.69 to 50 ppm NO 2 ), rapid response/recovery rate (25/10 s), ultralow detection limit (10 ppb), ideal selectivity, and excellent long-term stability (90 days). Further investigations suggested that the exceptional hydrophobicity of the CZWT heterostructure film and the dynamic Ce 3+ /Ce 4+ redox cycle endowed the sensors with humidity-tolerant response properties. In parallel, a wireless gas-detection device was developed to achieve the monitoring of NO 2 in humid environments. This work demonstrates an effective approach for designing humidity-independent MOS gas sensors.
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Humidity-Independent NO <sub>2</sub> Gas Sensors Based on CeO <sub>2</sub> /ZnO/WO <sub>3</sub> Heterostructure Films Fabricated by Template-Assisted Magnetron Sputtering — 科研速览 Science Skim