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◆ ACS Nano2025-12-09· Materials science

Ultralow-Power Tuning and Nonvolatile Operation on a Hybrid Silicon Nitride/Barium Titanate Integrated Photonics Platform

Xin Wang, Jie Tu, Min Sun, Wenfeng Zhou, Zhibo Cheng, Yikai Su, Binbin Chen, Yong Zhang

原始摘要(英文原文)· Original abstract
The information era imposes increasing demands on speed and energy efficiency, pushing conventional electronics to its physical limits. Silicon photonics offers a promising path forward, particularly when integrated with electro-optic ferroelectric materials, which can overcome fundamental bottlenecks in data rate and power consumption. With pronounced electro-optic activity and controllable ferroelectric domain orientation, thin-film barium titanate (BTO) presents a promising platform for advanced photonic integration. Here, we fabricate epitaxial BTO films on MgO substrates and use precise structural design to realize silicon nitride-BTO (SiN-BTO) hybrid microring devices. Through co-optimization of material synthesis and device architecture, we achieve a record-low power consumption of 0.0015 nW/pm─among the best reported values for electro-optic tuners and exhibiting the highest effective electro-optic coefficient for BTO-on-MgO platforms. Furthermore, we demonstrate nonvolatile tuning enabled by ferroelectric domain control, achieving an eight-level photonic device stable for over 12 h and optically readable switching energy of 0.191 pJ. This work establishes a versatile platform integrating the multifunctionality of ferroelectric BTO with energy-efficient photonic operation, providing a foundation for scalable circuits in next-generation communication, sensing, and computing systems.
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Ultralow-Power Tuning and Nonvolatile Operation on a Hybrid Silicon Nitride/Barium Titanate Integrated Photonics Platform — 科研速览 Science Skim